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SEC-Z700 series
SEC-Z700 series and CRITERION D200 series give stable flow rate control even with upstream and downstream pressure fluctuations. Typical multi chamber gas lines have a line regulator, pressure sensor and filter to avoid mass flow controller crosstalk phenomenon caused by pressure fluctuations.The new types of mass flow controller, SEC-Z700 series and CRITERION D200 series exhibit high stability and control the gas flow without effect of upstream and downstream pressure fluctuations. They not only give a flow rate output but also the temperature and pressure readings. Control interface is by analog, RS-485 and DeviceNetâ„¢ communication. Suitable for the high performance, compact and weight saving of the gas line.
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