Silica Monitor | Canada Analytical & Process Technologies

SLIA-300
The ultra-pure water that is used in the semiconductor production processes can be further purified by using an ion-exchange resin. Capturing the silica that is dissolved from this ion-exchange resin as quickly as possible can control the ultra-pure water quality, which is important during the production processes. HORIBA Advanced Techno has developed and employed a new "long light path length measurement cell" to enable highly sensitive measurement of ultra-low density silica and also realized a compact desktop model to improve the usability. With a broad range of standard features such as self-diagnosis and new performance improvements such as high-speed response and high sensitivity, this product provides enhanced support for the pure water processes in the production of semiconductors.

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