InSitu Particle Detectors | Canada Analytical & Process Technologies

INFICON Stiletto®
INFICON Stiletto® is a scanning-laser particle detection system that can find yield-limiting particle contamination in real time on every wafer. Its increased particle detection area and accurate particle counting and sizing, enable yield and productivity improvements for the most advanced semiconductor processes. INFICON Stiletto is capable of in situ metrology and process control, enabling yield and productivity improvements for the most advanced semiconductor processes.

Stiletto is the first in situ particle monitoring system to be fully integrated with the process tool. When combined with parametric tool data, particle counts can be overlaid with equipment status to allow engineers to identify the exact time and cause of particle formation. The ability of INFICON Stiletto to detect particles during every run of every wafer provides unprecedented protection against defect-induced yield loss. .

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