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As semiconductor devices get faster and levels of integration increase, more detail is required in device construction, to achieve this new materials are being introduced into the 300 mm wafer production process to increase production efficiency. As a result of this trend, there is now a larger variety of liquid sources and flow rates used in the semiconductor manufacturing process.
The Digital series of flow controller uses a Peltier element which cools the liquid rather than the more common thermal heating element; this gives the advantage of removing the risk of boiling those chemicals that have a low boiling point, thus allowing a greater range of chemical control.
HORIBASTEC is the world leader in this area offering a full line up liquid source vaporization control systems utilizing different methodologies including baking, direct injection and mixing to guarantee efficient and stable delivery of vapor to the point of use. Auto refill systems complete the lineup offering uninterrupted, safe and reliable delivery of the liquid precursor increasing uptime and reducing operator handling and risk of process contamination.
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Liquid mass flow meter specification
Liquid mass flow controller specification
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